Smart Microsystems Flagship Research Consortium
A Definition
The term Smart Microsystem refers to micro and nano-scale devices that combine electronic integrated circuits with additional, non-electronic components on a single substrate; thereby providing additional functionality. Such microsystems can be sub-divided into a myriad of application groups, including chemical, biological, optical, mechanical, electromagnetic and fluidic. The substrates on which Smart Microystems are fabricated are predominantly CMOS silicon but may also include compound semiconductors, glass, sapphire and flexible polymers. The sizes of the substrates could be anywhere from 200mm diameter wafers down to millimetre scale chips. This Flagship Smart Microystems research team will focus on the development of integrative manufacturing techniques and the employment of novel materials to create a portfolio of innovative multifunctional microsystems
Our vision is to treat platform silicon IC technology as a commodity element of the system with the value added part being the bespoke post-processing and the associated IP. As state-of-the-art CMOS technology is readily available from foundries without the need for any capital investment, the potential exists for SMEs and startup companies to readily exploit any technology that is developed. Moreover, as IC foundry-processes are updated, the technology is immediately accessible making any technology/product development future-proofed without additional financial outlay. Technologies such as the integration of novel materials and 3D integration at both wafer and chip scale can be implemented by post-processing standard foundry wafers, taking full advantage of wafer bonding techniques developed primarily for SOI and MEMS applications. Silicon+ in the form of smart microsystems provides opportunities for integrating a wide variety of technologies with silicon to provide a wealth of R&D opportunities that can readily be exploited. The formation of this Smart Microsystems cluster, based upon integrating novel materials and process provides the UK with the opportunity to create the critical mass to form an agile globally competitive manufacturing capacity so support innovation.
In summary, this Flagship research project will focus on the creation of innovative electronic based systems through integration of microelectronics with novel material and manufacturing technologies. This will involve adapting MNT to integrate electronic ICs with additional components, materials and technologies on single substrates, thereby providing increased device functionality. The IIS Smart Microsystems cluster can provide great flexibility in both substrate size (from 200mm wafers down to millimetre scale chips) and substrate material (such as SiC, III-V or II-VI compound semiconductors, glass, sapphire and flexible polymers). The resulting microsystems would address a myriad of application areas, including chemical, biological, optical, mechanical, electromagnetic and fluidic technologies.
Technical objectives
Some of the specific technical objectives of the Smart Microsystems cluster are to:
- Research, develop and validate CMOS-compatible magnetic, piezoelectric and magnetostrictive materials, as well as their associated deposition processes.
- To characterise equipment for post processing CMOS or compound semiconductor wafers, either at the manufacturing or the packaging stages.
- Develop and validate silicon based optical sensing technology integrated with microfluidics for healthcare and bio-medical applications.
- Develop and validate advanced actuation technologies for microfluidics, which are fully compatible with CMOS.
- Integrate sensor technology with SiC.
- Research and develop the integration of sensing technologies with IC-based signal processing.
- Transfer and disseminate to our industrial partners and the community at large the validated technologies and materials studied in this project as well as the foreground IP generated. Both the academic and industry partners have demonstrated their ability to achieve this together.
National and Global Impact
The Smart Microsystems cluster with help create a truly innovative and globally competitive manufacturing sector based upon a pipeline of research, both within the cluster, but also from global research teams, who do not have the facilities available to fully integrate their technologies. This is based on a strong track record of CMOS post-processing on CMOS wafers, leading facilities that include class 10 cleanrooms with wafer stepper lithography and a full 200mm equipment set together with one of the most successful records of providing technology transfer, both internally as well as for external customers. In addition to the innovation and technology transfer activities of the Flagship partnership will also deliver value to the UK community through the following mechanisms.
- Access to expertise and R&D associated with Smart Microsystems technology associated with a broad base of applications ranging from biology, though to microdisplays. Example technologies involve, sensors (e.g. electrodes, SPADS, membranes, accelerometers etc) and actuators (e.g. microfluidic manipulation, OLEDs, electrostatics, magnetics etc).
- An open access for the electronics manufacturing sector to the cluster's cleanroom and the associated equipment. Companies will be able embed engineers within the IIS cleanrooms taking full advantage of the facilities and the expertise to develop their processes and products based upon the research developments.
- Provide the sector with a flexible commercialisation route from R&D through to manufacture via the IIS (access to facilities and technical support) and Flagship partner companies (manufacturing). The cluster is well networked and has a track record of being able to provide a one stop shop by accessing external partners' technology when this is not available in-house.
- The IIS offers MSc courses in MEMS with Microphotonics, Bioelectronics, Nanotechnology and Microsystems, Analogue System Design, and Photonics and Optoelectronic Devices and the modules associated with this are available for CPD.
Contacts for further information
Professor Anthony J. Walton
Institute for Integrated Systems
Email: Anthony.Walton@ed.ac.uk Tel: 0131 650 5620 Fax: 0131 650 7475 |
Professor Marc Desmulliez
Institute for Integrated Systems
Email: M.Desmulliez@hw.ac.uk Tel: 0131 451 3340 Fax: 0131 451 4155 |
